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AMHS (including equipment
SEMI MF1530-0707 (technical revision)
It does not specify the report of SEMI E10 states from the equipment to a host computer
SEMI E77-0423 (technical revision)
SEMI G32 — Guideline for Unencapsulated Thermal Test Chip
E00109 - SEMI E1.9 - Mechanical Specification for Cassettes Used to Transport and Store 300 mm Wafers StdPbc-0115 AMHS (including equipmentNOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. This Standard specifies the cassettes used to transport and store 300 mm wafers in an IC manufacturing facility. This includes both manual and auto transport use as well as high speed extraction of the wafers in processing
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